ETCH RATES
Etch rates (Unit = Angstroms/Minute) posted here are estimates intended to provide insight on etching of various materials.
Actual etch rates will vary depending on material stock used.
| Material |
Etch Rate (A/min) |
| Ag |
1050 |
| Al |
373 |
| Al 203 |
48 |
| Au |
630 |
| AZ 1350 |
117 |
| Be |
76 |
| Bi |
5133 |
| C |
64 |
| CdS |
1283 |
| Co |
262 |
| Cr |
309 |
| Cu |
513 |
| Fe |
204 |
| GaAs (100) |
379 |
| GaAs (110) |
933 |
| Gap (111) |
927 |
| GaPb (111) |
1091 |
| Ge |
537 |
| Hf |
385 |
| InSb |
887 |
| Ir |
344 |
| LiNbO3 |
227 |
| Mg |
131 |
| Mn |
507 |
| Mo |
239 |
| Mo2C |
163 |
| Nb |
274 |
| Ni |
309 |
| Ni80Fe2O |
292 |
|
| Material |
Etch Rate (A/min) |
| NiCr |
309 |
| Os |
292 |
| Pb |
1517 |
| PbTe |
2199 |
| Pd |
642 |
| Pt |
362 |
| PZT Ceramic |
62 |
| Rb |
2333 |
| Re |
303 |
| Rh |
420 |
| Riston 14 |
146 |
| Ru |
356 |
| Sb |
1889 |
| Si |
216 |
| SiC |
204 |
| SiO2 |
192 |
| Sn |
700 |
| Soda Glass |
117 |
| Ta |
245 |
| Ta2O5 |
350 |
| TaC |
87 |
| TaN |
233 |
| Ti |
192 |
| TiOrTiW |
195 |
| V |
181 |
| W |
198 |
| Y |
554 |
| Zr |
332 |
|
